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Proceedings Paper

Study of zero error in large-scale laser interferometric measurement system
Author(s): Jian-shuang Li; Xiao-you Ye; Mingzhao He; Xiao-chuan Gan; Tao Wang
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Paper Abstract

Large-scale measurement systems of range over 30m are main traceable devices of dimensional measurement for modern large-scale advanced manufacture domain. High precision large-scale dimensional measurement devices with flexibility and openness are made up of length measurement system, environmental measuring system, guiding rail system and control system. In length measurement system using laser interferometers, zero error should be taken into account. This paper proposed a novel method to eliminate zero error in large-scale laser interferometric measurement system. The uncertainty of this system is improved experimentally.

Paper Details

Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8420, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical System Technologies for Manufacturing and Testing, 842006 (15 October 2012); doi: 10.1117/12.974852
Show Author Affiliations
Jian-shuang Li, National Institute of Metrology (China)
Xiao-you Ye, National Institute of Metrology (China)
Mingzhao He, National Institute of Metrology (China)
Xiao-chuan Gan, National Institute of Metrology (China)
Tao Wang, National Institute of Metrology (China)


Published in SPIE Proceedings Vol. 8420:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical System Technologies for Manufacturing and Testing
Xiangdi Lin; Yoshiharu Namba; Tingwen Xing, Editor(s)

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