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Proceedings Paper

A rapid optical system for surface roughness measurements of ZrCN hard films
Author(s): Chil-Chyuan Kuo
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Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 876944; doi: 10.1117/12.974810
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Chil-Chyuan Kuo, Ming Chi University of Technology (Taiwan)


Published in SPIE Proceedings Vol. 8769:
International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013)
Chenggen Quan; Kemao Qian; Anand Asundi, Editor(s)

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