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Proceedings Paper

Surface figure measurement of flat mirrors based on the subaperture stitching interferometry
Author(s): Pengqian Yang; Stefan Hippler; Zhaojun Yan; Rainer Lenzen; Wolfgang Brandner; Casey Deen; Thomas Henning; Armin Huber; Sarah Kendrew; Jianqiang Zhu
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Paper Abstract

Large flat mirrors can be characterized using a standard interferometer coupled with stitching the subaperture measurement data. Such systems can measure the global full map of the optical surface by minimizing the inconsistency of data in the adjacent regions. We present a stitching technique that makes use of a commercial phase-shifting Twyman- Green interferometer in combination with an iterative optimized stitching algorithm. The proposed method has been applied to determine the surface errors of planar mirrors with an accuracy of a few nanometers. Moreover, the effect of reference wavefront error is explored. The feasibility and the performance of the proposed system are also demonstrated, along with a detailed error analysis and experimental results.

Paper Details

Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 841723 (15 October 2012); doi: 10.1117/12.974568
Show Author Affiliations
Pengqian Yang, Max-Planck-Institut für Astronomie (Germany)
Shanghai Institute of Optics and Fine Mechanics (China)
Graduate Univ. of the Chinese Academy of Sciences (China)
Stefan Hippler, Shanghai Institute of Optics and Fine Mechanics (China)
Zhaojun Yan, Max-Planck-Institut für Astronomie (Germany)
Rainer Lenzen, Max-Planck-Institut für Astronomie (Germany)
Wolfgang Brandner, Max-Planck-Institut für Astronomie (Germany)
Casey Deen, Max-Planck-Institut für Astronomie (Germany)
Thomas Henning, Max-Planck-Institut für Astronomie (Germany)
Armin Huber, Max-Planck-Institut für Astronomie (Germany)
Sarah Kendrew, Max-Planck-Institut für Astronomie (Germany)
Jianqiang Zhu, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 8417:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Libin Xiang; Sandy To, Editor(s)

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