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Proceedings Paper

R3 measurement by white light interferometry
Author(s): Mihaela Bojan; D. Apostol; N. Cernescu; Iuliana Iordache; V. Damian; Paul Schiopu
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Paper Abstract

Radius, roundness and roughness, the three R are the necessary parameters to characterize ball bearings. Roundness is one of the most important geometric forms expected from circular features. Most traditional R3 measuring instruments are stylus type, including the coordinate measuring machines (CMMs). The accuracy requirements for roundness measurements range from a few 0.1 μm for work pieces down to below 10 nm for roundness standards such as precision spheres. White light interferometer is a suitable noncontact method for height profile measurement of objects able to furnish such values. White light interferometer (WLI) produced by Ambios Xi-100 was used to measure radius, roundness and roughness of steel ball bearings. Radius is calculated from the Newton rings easily observed in the interferometer, roundness is observed by limiting the height surface profile between two inner and exterior circles and roughness is RMS value for the best fit line to the ball profile. All the values can be easily obtained from the .txt files produced by the instrument software.

Paper Details

Date Published: 1 November 2012
PDF: 8 pages
Proc. SPIE 8411, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VI, 841106 (1 November 2012); doi: 10.1117/12.974491
Show Author Affiliations
Mihaela Bojan, National Institute for Lasers, Plasma and Radiation Physics (Romania)
D. Apostol, National Institute for Lasers, Plasma and Radiation Physics (Romania)
N. Cernescu, National Institute for Lasers, Plasma and Radiation Physics (Romania)
Iuliana Iordache, National Institute for Lasers, Plasma and Radiation Physics (Romania)
V. Damian, National Institute for Lasers, Plasma and Radiation Physics (Romania)
Paul Schiopu, Politehnica Univ. of Bucharest (Romania)


Published in SPIE Proceedings Vol. 8411:
Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VI
Paul Schiopu; Razvan Tamas, Editor(s)

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