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Proceedings Paper

Ultra-precision surface polishing using ion beam figuring
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Paper Abstract

Contrary to conventional mechanical polishing methods using polyurethane or pitch tool, non-contact polishing technique based on ion beam sputtering provides deterministic and ultra-precision surfacing at any given surfaces. Owing to no contact between a tool and a workpiece, several issues related to tool wear and edge effects can be evitable. Moreover, the atomic level sputtering makes it possible to obtain ultra-precision optical surfaces with a sub-nanometer surface roughness. In this paper, we have simulated ion beam figuring process according to the characteristics of ion beam and performed a simple test.

Paper Details

Date Published: 16 October 2012
PDF: 4 pages
Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 84161O (16 October 2012); doi: 10.1117/12.973725
Show Author Affiliations
Young-Sik Ghim, Korea Research Institute of Standards and Science (Korea, Republic of)
Shin-Jae You, Korea Research Institute of Standards and Science (Korea, Republic of)
Hyug-Gyo Rhee, Korea Research Institute of Standards and Science (Korea, Republic of)
Ho-Soon Yang, Korea Research Institute of Standards and Science (Korea, Republic of)
Yun-Woo Lee, Korea Research Institute of Standards and Science (Korea, Republic of)


Published in SPIE Proceedings Vol. 8416:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Eric Ruch; Shengyi Li, Editor(s)

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