Share Email Print
cover

Proceedings Paper

Study on thermal damage of Diamond-like carbon films based on the finite element method
Author(s): Yao Zeng; Lihong Yang
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Studying on laser damage mechanism of optical thin film is the basis for film laser damage resistance. Thermal injury is one of the key factors in the major causes of optical thin film laser damage. Researching laser thermal injury, analysis of characteristics of thermal injury, is an important assure to improve the film resistance properties. Based on the laser thermal injury theory, used the finite element method for the analysis of thermal injury effect in diamond-like carbon(DLC) films which irradiated by 1064nm Nd: YAG laser. A model for the DLC films thermal injury temperature field is established, we studied the thermal injury caused by Nd: YAG laser in Diamond-like carbon films, and used the finite element analysis method for analysis, operated ANSYS to simulate and calculate the temperature distribution while the film is under laser irradiation. By calculating the stress distribution, the reason of thermal damage is analyzed.

Paper Details

Date Published: 15 October 2012
PDF: 7 pages
Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 841714 (15 October 2012); doi: 10.1117/12.973696
Show Author Affiliations
Yao Zeng, Xi'an Technological Univ. (China)
Lihong Yang, Xi'an Technological Univ. (China)


Published in SPIE Proceedings Vol. 8417:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Libin Xiang; Sandy To, Editor(s)

© SPIE. Terms of Use
Back to Top