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Proceedings Paper

Plasma spectrum peak extraction algorithm of laser film damage
Author(s): Dan Zhao; Jun-hong Su; Jun-qi Xu
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Paper Abstract

The plasma spectrometry is an emerging method to distinguish the thin-film laser damage. Laser irradiation film surface occurrence of flash, using the spectrometer receives the flash spectrum, extracting the spectral peak, and by means of the spectra of the thin-film materials and the atmosphere has determine the difference, as a standard to determine the film damage. Plasma spectrometry can eliminate the miscarriage of justice which caused by atmospheric flashes, and distinguish high accuracy. Plasma spectra extraction algorithm is the key technology of Plasma spectrometry. Firstly, data de noising and smoothing filter is introduced in this paper, and then during the peak is detecting, the data packet is proposed, and this method can increase the stability and accuracy of the spectral peak recognition. Such algorithm makes simultaneous measurement of Plasma spectrometry to detect thin film laser damage, and greatly improves work efficiency.

Paper Details

Date Published: 15 October 2012
PDF: 7 pages
Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84171R (15 October 2012); doi: 10.1117/12.973677
Show Author Affiliations
Dan Zhao, Xi'an Technological Univ. (China)
Jun-hong Su, Xi'an Technological Univ. (China)
Jun-qi Xu, Xi'an Technological Univ. (China)


Published in SPIE Proceedings Vol. 8417:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Libin Xiang; Sandy To, Editor(s)

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