
Proceedings Paper
Design of Nanosecond Pulse Laser Micromachining System Based On PMACFormat | Member Price | Non-Member Price |
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Paper Abstract
Pulse laser micromachining technology, as a branch of laser processing technology, has been widely used in MEMS
device processing, aviation, instruments fabrication, circuit board design etc.. In this paper, a novel nanosecond pulse
laser micromachining system is presented, which consists of nanosecond pulse LASER, optical path mechanical
structure, transmission system, motion control system. Nanosecond pulse UV laser, with 355 nm wavelength and 40ns
pulse width, is chosen as the light source. Optical path mechanical structure is designed to get ideal result of laser
focusing. Motion control system, combining PMAC card with the PC software, can control the 3-D motion platform and
complete microstructure processing. By CCD monitoring system, researchers can get real-time detection on the effect of
laser beam focusing and processing process.
Paper Details
Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 84180K (15 October 2012); doi: 10.1117/12.973663
Published in SPIE Proceedings Vol. 8418:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems
Tianchun Ye; Xiangang Luo; Xiaoyi Bao; Song Hu; Yanqiu Li, Editor(s)
PDF: 6 pages
Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 84180K (15 October 2012); doi: 10.1117/12.973663
Show Author Affiliations
Mingyan Liu, Tianjin Univ. (China)
Xing Fu, Tianjin Univ. (China)
Linyan Xu, Tianjin Univ. (China)
Xing Fu, Tianjin Univ. (China)
Linyan Xu, Tianjin Univ. (China)
Qian Lin, Tianjin Univ. (China)
Shuang Gu, Tianjin Univ. (China)
Shuang Gu, Tianjin Univ. (China)
Published in SPIE Proceedings Vol. 8418:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems
Tianchun Ye; Xiangang Luo; Xiaoyi Bao; Song Hu; Yanqiu Li, Editor(s)
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