Share Email Print
cover

Proceedings Paper

High efficient and ultra-precision machining of large scale SiC plane reflectors
Author(s): Rui Guo; Ying Su; Chao-ping Chen; Yun-long Zhang; Feng Zhang; Xuan-min Liu
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Based on the motion relationship of abrasive and workpiece, the abrasive kinds and the crucial parameters in rough lapping, fine lapping, rough polishing and fine polishing were established through a lot of technology experiments firstly in this work. The exploring experiments indicate the high quality surface of SiC plane reflector can be finished in short time. Secondly, the validation experiments were performed on the large scale SiC plane mirror with a size of 225×172 mm2. As a result, the machining flow sheet was erected. Moreover, the machining tool, abrasive kinds, abrasive size, processing methods and testing solutions were all assembled in response to the flow sheet. The finished of 225×172 mm2 SiC plane mirror was tested and evaluated. The results show that the surface figure error, i.e. PV, is 0.0117μm, and the surface roughness RMS is close to 0.68nm.

Paper Details

Date Published: 16 October 2012
PDF: 6 pages
Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 84160X (16 October 2012); doi: 10.1117/12.973661
Show Author Affiliations
Rui Guo, Xi'an Institute of Applied Optics (China)
Ying Su, Xi'an Institute of Applied Optics (China)
Chao-ping Chen, Xi'an Institute of Applied Optics (China)
Yun-long Zhang, Xi'an Institute of Applied Optics (China)
Feng Zhang, Xi'an Institute of Applied Optics (China)
Xuan-min Liu, Xi'an Institute of Applied Optics (China)


Published in SPIE Proceedings Vol. 8416:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Eric Ruch; Shengyi Li, Editor(s)

© SPIE. Terms of Use
Back to Top