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Proceedings Paper

Research on Micro-Displacement Driving Technology Based on Piezoelectric Ceramic
Author(s): Bo Hu; Xiaoping Tang; Song Hu; Wei Yan; Zhicheng Hu
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Paper Abstract

Piezoelectric ceramic driving power is one critical technology of achieving the piezoelectric ceramic nano-precision positioning, which has been widely used in precision manufacturing, optical instruments, aerospace and other fields. In this paper, piezoelectric ceramic driving power will be summarized on micro-displacement driving technical development and research. The domestic and overseas piezoelectric-driven ways will be compared and control model algorithms will be discussed. Describe the advantages and disadvantages of piezoelectric ceramic driving power in a different driving and control model, and then show the scope of application of driving power.

Paper Details

Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 84180Z (15 October 2012); doi: 10.1117/12.973648
Show Author Affiliations
Bo Hu, Institute of Optics and Electronics (China)
Graduate Univ. of Chinese Academy of Sciences (China)
Xiaoping Tang, Institute of Optics and Electronics (China)
Song Hu, Institute of Optics and Electronics (China)
Wei Yan, Institute of Optics and Electronics (China)
Zhicheng Hu, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 8418:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems
Tianchun Ye; Song Hu; Yanqiu Li; Xiangang Luo; Xiaoyi Bao, Editor(s)

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