Share Email Print
cover

Proceedings Paper

Study on Control Strategy for Coarse/Fine Dual-stage of Step and Scan Lithography
Author(s): Qi Liu; Ping Ma; Song Hu; Lanlan Li; Jiangping Zhu; Zhuang Sheng
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Lithography is one of the most important and complicated key equipments for the Integrated Circuit (IC) manufacture. The ultra-precision stage is the important subsystem of lithography and its motion performance impacts directly on the resolution and throughput of lithography. In this paper, a robust and high response speed control strategy for dual-stage manipulator is presented. The coarse/fine dual-stage uses the linear motor driven coarse (macro) positioning stage and the Lorenz plane motor driven fine (micro) positioning stage. By adopting merits of both coarse and fine actuator, a desirable system having the capacity of large workspace with high resolution of motion is enabled. The feedback controller is constructed so that the fine stage tracks the coarse stage errors. The controller is robustly designed as the master-slave control strategy. In addition, the position decoupling which translates fine stage’s machine position command into its actual position command are discussed and, as a result, the overall coarse/fine dual-stage servo system exhibits robust and high response speed performance. Simulation shows that master-slave controller can much decrease positioning error and improve response speed of the coarse/fine dual-stage system.

Paper Details

Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 84180X (15 October 2012); doi: 10.1117/12.971471
Show Author Affiliations
Qi Liu, Institute of Optics and Electronics (China)
Graduate Univ. of Chinese Academy of Sciences (China)
Ping Ma, Institute of Optics and Electronics (China)
Song Hu, Institute of Optics and Electronics (China)
Lanlan Li, Institute of Optics and Electronics (China)
Graduate Univ. of Chinese Academy of Sciences (China)
Jiangping Zhu, Institute of Optics and Electronics (China)
Graduate Univ. of Chinese Academy of Sciences (China)
Zhuang Sheng, Institute of Optics and Electronics (China)
Graduate Univ. of Chinese Academy of Sciences (China)


Published in SPIE Proceedings Vol. 8418:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems
Tianchun Ye; Song Hu; Yanqiu Li; Xiangang Luo; Xiaoyi Bao, Editor(s)

© SPIE. Terms of Use
Back to Top