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Proceedings Paper

Development of the flatness standard equipment
Author(s): Mengxia Liu
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Paper Abstract

Flatness is an important parameter of independent transmission in geometric metrology. The flatness standard is by interferometer and optical flats to implement transmission. Main parts of the flatness standard equipment are composed of a laser point diffraction interference system, one phase shifts system and one image acquisition system. The equipment is three PZTs to drive the Φ 300mm reference optical flat to move, only one CCD to adjust attitudes of the optical flats by reflecting spots and capture a series of interference pictures. The whole equipment is placed on a one 1200mm×800mm optical platform, and the optical platform is placed on a Φ1800mm vibration-free base. The optical system of the flatness standard equipment is very simple, which only needs a frequency stabilized He-Ne laser and a space filter to construct a point source, one reflecting mirror, one beam splitter, one Φ 300mm transparent collimating system, one needle-hole stop, one CCD and its lens.

Paper Details

Date Published: 15 October 2012
PDF: 5 pages
Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 841712 (15 October 2012); doi: 10.1117/12.971458
Show Author Affiliations
Mengxia Liu, Changcheng Institute of Metrology and Measurement (China)


Published in SPIE Proceedings Vol. 8417:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Libin Xiang; Sandy To, Editor(s)

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