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Proceedings Paper

Fabrication of a new type of transmission grating with holography interferometry and wet anisotropic etching
Author(s): Yong Chen; Keqiang Qiu; Xiangdong Xu; Yilin Hong; Zhenkun Liu; Ying Liu; Shaojun Fu
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Paper Abstract

As a new type of grating, the freestanding blazed transmission grating combines the advantages of traditional transmission gratings (low mass, relaxed alignment and flatness figure insensitivity) with those of reflection gratings (high broadband diffraction efficiency, high spectral resolution). A freestanding blazed transmission grating with period of 1μm was successfully fabricated by holographic lithography and anisotropic wet etching of silicon. The duty cycle is about 0.13. The aspect ratio of a single grating bar is about 77. The thickness is 10μm and the open area fraction is about 58.8%. The size of a single die is 15mm×15mm divided into four 5mm ×5mm windows. The diffraction efficiency of the grating was measured at the National Synchrotron Radiation Laboratory in the wavelength region of 5-50nm. The results show a strong blazing effect in the direction of specular reflection from mirror-like grating sidewalls, as expected.

Paper Details

Date Published: 15 October 2012
PDF: 5 pages
Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 84180O (15 October 2012); doi: 10.1117/12.971424
Show Author Affiliations
Yong Chen, Univ. of Science and Technology of China (China)
Keqiang Qiu, Univ. of Science and Technology of China (China)
Xiangdong Xu, Univ. of Science and Technology of China (China)
Yilin Hong, Univ. of Science and Technology of China (China)
Zhenkun Liu, Univ. of Science and Technology of China (China)
Ying Liu, Univ. of Science and Technology of China (China)
Shaojun Fu, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 8418:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems
Tianchun Ye; Song Hu; Yanqiu Li; Xiangang Luo; Xiaoyi Bao, Editor(s)

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