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Proceedings Paper

Measurement of soft x-ray grazing incidence optical scattering phenomena
Author(s): Shu-yan Chen; Xin-jun Xu; Li-ping Su
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Paper Abstract

The optical performance is severely degraded by surface scattering effect, especially for short wavelength imaging systems. Surface scattering effect is one of important factors degrading imaging performance. Study of non-intuitive surface scattering effect resulted from practical optical fabrication tolerances is a necessary work for optical performance evaluation of high resolution imaging systems. In this paper, a surface scattering numerical model of grazing incidence imaging systems is discussed. Then Soft X-ray optical scattering distribution is measured by soft X-ray reflectometer at different conditions. PSF (point spread function) is computed by experimental data of sample, and compared with PSF analysized by scattering LSI model. It is indicated that we can detect short wavelength optical scattering Phenomena through soft X-ray grazing incidence optical scattering experimentation we did.

Paper Details

Date Published: 15 October 2012
PDF: 7 pages
Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 841738 (15 October 2012); doi: 10.1117/12.971318
Show Author Affiliations
Shu-yan Chen, Harbin Engineering Univ. (China)
Xin-jun Xu, Harbin Engineering Univ. (China)
Li-ping Su, Harbin Engineering Univ. (China)


Published in SPIE Proceedings Vol. 8417:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Libin Xiang; Sandy To, Editor(s)

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