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Proceedings Paper

Inverse Open loop Control of a Nano-positioner Based on Piezo-electric Actuators
Author(s): Shu Qiang; Xuejun Rao; Ningping Shi
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Paper Abstract

Piezo-electric actuators with advantage of fast responsiveness, large force output, low power consumption, negligible friction and no backlash are widely used in precision positioning, adaptive optics and vibration conduction. However its inherent hysteresis brings difficulty to high precision positioning. To describe the hysteresis, a mathematical model based on experimental data is used. And the inverse of the model is connected to the piezo-electric actuator as a controller to compensating the hysteresis. In this paper KP operator is used to model the hysteresis of piezo-electric actuators and a numerical algorithm is proposed to compute the inverse. Experiments data of major hysteresis loop and minor loop collected on a nano-positioning stage are used to identify the model Γ based on which the inverse model Γ-1 is developed. Experiments show that given a voltage series the model Γ can give displacement prediction which has an error of 6% relative to experimental results and Γ-1 can give voltage prediction with the error of 5% relative to the experimental data.

Paper Details

Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 84181I (15 October 2012); doi: 10.1117/12.970645
Show Author Affiliations
Shu Qiang, Institute of Optics and Electronics (China)
Key Lab. on Adaptive Optics (China)
Graduate Univ. of Chinese Academy of Sciences (China)
Xuejun Rao, Institute of Optics and Electronics (China)
Key Lab. on Adaptive Optics (China)
Ningping Shi, Institute of Optics and Electronics (China)
Key Lab. on Adaptive Optics (China)


Published in SPIE Proceedings Vol. 8418:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems
Tianchun Ye; Song Hu; Yanqiu Li; Xiangang Luo; Xiaoyi Bao, Editor(s)

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