The system errors and random errors of a CCD sensor cause measurement errors of a laser spot width. Taking the Gaussian spot as example, the computer simulation method is used to analyze the influences of the measurement window size, the non-ideal integral sampling, the number of quantization lever and the read-out noise on the measurement precision of Gaussian spot width respectively, and the synthesized influences of these four kinds of error sources of the laboratory 8-bit CCD sensor on the measurement precision of Gaussian spot width. An optimal measurement window size is given. Simulation results are analyzed and discussed.

Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 841720 (15 October 2012); doi: 10.1117/12.970553

Published in SPIE Proceedings Vol. 8417:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Libin Xiang; Sandy To, Editor(s)