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Proceedings Paper

Depth-segmented partial-wave microscopic spectroscopy for subsurface defects' micro-nano structure detection and characterization
Author(s): Qianqian Wang; Zhihua Ding
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Paper Abstract

Nondestructive surface inspection technology is getting mature, nevertheless, there is an urgent requirement for method capable of detection and characterization of the subsurface defects at micron to nanometer scales. In this paper, we propose a method for the detection and characterization of the subsurface defects based on the depth-segmented partial-wave microscopic spectroscopy. By combination of optical coherence tomography with partial-wave microscopic spectroscopy, depth-segmented partial-wave microscopic spectroscopy capable of micro-nano structure detection and characterization at specific depth range is put forward.

Paper Details

Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 84180P (15 October 2012); doi: 10.1117/12.970518
Show Author Affiliations
Qianqian Wang, Zhejiang Univ. (China)
Zhihua Ding, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 8418:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems
Tianchun Ye; Song Hu; Yanqiu Li; Xiangang Luo; Xiaoyi Bao, Editor(s)

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