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Proceedings Paper

Measurement of power spectral density of optical super-smooth surface
Author(s): Dai Lei
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Paper Abstract

This Paper discusses techniques for measurements power spectral density (PSD) of optical super-smooth surface using scanning white light interferometer (SWLI). Analyzing the key point of PSD measurement, how to reduce the noise level and the system error. Using different objectives to test surface and giving PSD distribution spatial frequency range from 1 to 1000 mm-1. Then it will be convenient to the roughness of certain spatial frequency range. Roughness of super smooth surface is nearly 0.5nm rms from 1 to 1000 mm-1.

Paper Details

Date Published: 15 October 2012
PDF: 5 pages
Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84171B (15 October 2012); doi: 10.1117/12.970308
Show Author Affiliations
Dai Lei, Changchun Institute of Optics, Fine Mechanics and Physics (China)


Published in SPIE Proceedings Vol. 8417:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Libin Xiang; Sandy To, Editor(s)

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