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Proceedings Paper

Novel MRC algorithms using GPGPU
Author(s): Kokoro Kato; Yoshiyuki Taniguchi; Tadao Inoue; Kazuya Kadota
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Paper Abstract

GPGPU (General Purpose Graphic Processor Unit) has been attracting many engineers and scientists who develop their own software for massive numerical computation. With hundreds of core-processors and tens of thousands of threads operating concurrently, GPGPU programs can run significantly fast if their software architecture is well optimized. The basic program model used in GPGPU is SIMD (Single Instruction Multiple Data stream), and one must adapt his programming model to SIMD. However, conditional branching is fundamentally not allowed in SIMD and this limitation is quite challenging to apply GPGPU to photomask related software such as MDP or MRC. In this paper unique methods are proposed to utilize GPU for MRC operation. We explain novel algorithms of mask layout verification by GPGPU.

Paper Details

Date Published: 30 June 2012
PDF: 11 pages
Proc. SPIE 8441, Photomask and Next-Generation Lithography Mask Technology XIX, 84410R (30 June 2012); doi: 10.1117/12.970255
Show Author Affiliations
Kokoro Kato, SII NanoTechnology Inc. (Japan)
Yoshiyuki Taniguchi, SII NanoTechnology Inc. (Japan)
Tadao Inoue, SII NanoTechnology Inc. (Japan)
Kazuya Kadota, National Institute of Advanced Industrial Science and Technology (Japan)

Published in SPIE Proceedings Vol. 8441:
Photomask and Next-Generation Lithography Mask Technology XIX
Kokoro Kato, Editor(s)

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