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Proceedings Paper

Partial Least-Squares Calibration Diagnostics Applied To The FT-IR Analysis Of Borophosphosilicate Glass (BPSG) Thin Films
Author(s): David M. Haaland
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Paper Abstract

Full-spectrum multivariate calibration methods are capable of providing a multitude of diagnostic capabilities for evaluating the quality of the calibration, identifying problem calibration samples, and flagging unknown samples whose analysis by these methods might be unreliable. These diagnostics are demonstrated for the analysis of BPSG thin films on silicon using infrared spectroscopy and partial least-squares methods.

Paper Details

Date Published: 1 December 1989
PDF: 2 pages
Proc. SPIE 1145, 7th Intl Conf on Fourier Transform Spectroscopy, (1 December 1989); doi: 10.1117/12.969531
Show Author Affiliations
David M. Haaland, Sandia National Laboratories (United States)


Published in SPIE Proceedings Vol. 1145:
7th Intl Conf on Fourier Transform Spectroscopy

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