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Proceedings Paper

Automated FT-IR Grazing Angle Microscopy - A New Approach To Micro Spatial Chemical Mapping Of Thin Films
Author(s): Frederick P. Eng
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Paper Abstract

With the recent emergence of microscopes combined with FT-IR spectrometers, a new approach to micro-analyze polymer/organic materials has evolved. Samples with size and thickness less than 100 micrometers and 5 nm, respectively, can be analyzed. There are basically two types of infrared microscopes - near normal and grazing angle of incidence. The former provides both transmission and reflectance (near normal angle of incidence) sampling modes whereas the latter focuses only on reflectance using a grazing angle of incidence that ranges from 66 to 84 degrees. The grazing angle microscope, which relatively is more sensitive, is a better approach in analyzing or characterizing micro thin films, smears, or spots on reflective surfaces. Automation of the grazing angle microscope expands its capability further to study micro spatial chemical mapping of polymer, organic, and even inorganic thin films on reflective surfaces. The results yield the thickness map of the thin film in a micro-scopic scale that could not possibly or easily be archievedin the past by any analytical technique. Different mapping patterns such as straight lines, squares, rectangles, circles, spirals, sectors, and circular bands can be routinely accomplished using an IBM PC/AT that controls both the FT-IR spectrometer and the motorized X-Y and theta positioning stage of the microscope.

Paper Details

Date Published: 1 December 1989
PDF: 1 pages
Proc. SPIE 1145, 7th Intl Conf on Fourier Transform Spectroscopy, (1 December 1989); doi: 10.1117/12.969474
Show Author Affiliations
Frederick P. Eng, International Business Machines (United States)

Published in SPIE Proceedings Vol. 1145:
7th Intl Conf on Fourier Transform Spectroscopy

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