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Proceedings Paper

Applications Of Image Analysis For Infrared Microspectroscopic Detection Of Contaminants On Microelectronic Devices
Author(s): Kenneth J. Ward
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Paper Abstract

The use of infrared microscopy imaging for location and identification of contaminants on microelectronic devices is discussed. Several methods for reconstruction of images from the spectrum acquired at each pixel were compared. Peak-height and peak-integration methods require prior knowledge of the contaminant to narrow the spectral region of interest. These frequency-limited methods performed better than full-spectrum methods. When full-spectrum methods must be used, Gram-Schmidt reconstruction performed better than integration.

Paper Details

Date Published: 1 December 1989
PDF: 2 pages
Proc. SPIE 1145, 7th Intl Conf on Fourier Transform Spectroscopy, (1 December 1989); doi: 10.1117/12.969429
Show Author Affiliations
Kenneth J. Ward, Sandia National Laboratories (United States)


Published in SPIE Proceedings Vol. 1145:
7th Intl Conf on Fourier Transform Spectroscopy
David G. Cameron, Editor(s)

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