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Proceedings Paper

An Evaluation Of Instrumental Correction Factors For Infrared Absorption Concentration Measurements
Author(s): Aslan Baghdadi
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Paper Abstract

This paper presents an analysis of a large multilaboratory set of infrared spectra to investigate the possibility of self-calibration of infrared spectrophotometers. The spectra were obtained from a round-robin study conducted in the U.S., Europe, Japan and China to determine the conversion coefficient for the determination of interstitial oxygen in silicon by infrared absorption spectroscopy.' Accurate measurement of the oxygen content of silicon wafers destined for integrated circuit manufacture is required in order to properly design the fabrication process.2

Paper Details

Date Published: 1 December 1989
PDF: 3 pages
Proc. SPIE 1145, 7th Intl Conf on Fourier Transform Spectroscopy, (1 December 1989); doi: 10.1117/12.969409
Show Author Affiliations
Aslan Baghdadi, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 1145:
7th Intl Conf on Fourier Transform Spectroscopy

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