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Proceedings Paper

Laser Excited Synthesis Of Sub-Micron Powders
Author(s): J. G. M. Becht; B. A. Bauer; P. J. van der Put; J. Schoonman; B. Scarlett
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Paper Abstract

The laser activated synthesis of silicon and silicon nitride powders has been studied using gaseous reactants. The use of non-IR-absorbing, chlorinated silanes requires the application of a sensitizer, which transfers the thermal energy to the reactants. The influence of the sensitizer sulphur hexafluoride on the laser activated reactions of dichloro silane and silicon tetrachloride in the presence of ammonia has been studied.

Paper Details

Date Published: 16 January 1988
Proc. SPIE 0952, Laser Technologies in Industry, (16 January 1988); doi: 10.1117/12.968919
Show Author Affiliations
J. G. M. Becht, Delft University of Technology (Netherlands)
B. A. Bauer, Delft University of Technology (Netherlands)
P. J. van der Put, Delft University of Technology (Netherlands)
J. Schoonman, Delft University of Technology (Netherlands)
B. Scarlett, Delft University of Technology (Netherlands)

Published in SPIE Proceedings Vol. 0952:
Laser Technologies in Industry
Silverio P. Almeida; Luis Miguel Bernardo; Oliverio D.D. Soares, Editor(s)

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