Proceedings PaperModern Optical Coating Technologies For Low-Loss Dielectric Films
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Highest quality dielectric films are required today for various optical applications. Many inorganic compounds which were difficult to deposit by conventional tech-niques in form of well adherent, dense, hard, and stable low-loss films are now routinly synthesized by reactive gas discharge plasma and energetic ion and/or coating material atom processes. A survey over such PVD coating technologies and the resulting film properties is given in this paper.