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Proceedings Paper

Metal-Silicon Reactions With Laser Pulses
Author(s): A. Luches; E. D'Anna; G. Leggieri; M. R. Perrone
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Paper Abstract

The work done on the synthesis of metal silicides by using different pulsed lasers (ruby, Nd:glass, excimer) is presented and discussed. We found that excimer lasers offer much better characteristics for annealing of metal/silicon systems in comparison to solid state lasers.

Paper Details

Date Published: 16 January 1988
Proc. SPIE 0952, Laser Technologies in Industry, (16 January 1988); doi: 10.1117/12.968898
Show Author Affiliations
A. Luches, University of Lecce (Italy)
E. D'Anna, University of Lecce (Italy)
G. Leggieri, University of Lecce (Italy)
M. R. Perrone, University of Lecce (Italy)

Published in SPIE Proceedings Vol. 0952:
Laser Technologies in Industry
Silverio P. Almeida; Luis Miguel Bernardo; Oliverio D.D. Soares, Editor(s)

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