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Proceedings Paper

Physical Backgrounds Of Laser Inspection Of Surface Roughness
Author(s): H. A. Ferwerda
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Paper Abstract

We present the physical backgrounds of contactless optical inspection of (rough) surfaces by means of scattering of laser light from these surfaces.

Paper Details

Date Published: 16 January 1988
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Proc. SPIE 0952, Laser Technologies in Industry, (16 January 1988); doi: 10.1117/12.968855
Show Author Affiliations
H. A. Ferwerda, Universiteitscomplex Paddepoel (Netherlands)


Published in SPIE Proceedings Vol. 0952:
Laser Technologies in Industry

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