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Proceedings Paper

High Efficiency X-ray Zoneplates by Layering and Index Grading
Author(s): Donald L. White
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Paper Abstract

X-ray zoneplates are usually made by lithographic means. This limits the resolution to features no smaller than that of the smallest zone, i.e. resolution no better than the e-beam used to generate the zoneplate. Energy is diffracted into several modes, which not only lowers efficiency, but different modes (real, virtual, zero order, plus higher order,) interfere with each other and make precise lithography impossible.

Paper Details

Date Published: 1 August 1989
PDF: 6 pages
Proc. SPIE 1089, Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies VIII, (1 August 1989); doi: 10.1117/12.968535
Show Author Affiliations
Donald L. White, ATT Bell Laboratories (United States)


Published in SPIE Proceedings Vol. 1089:
Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies VIII
Arnold W. Yanof, Editor(s)

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