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Proceedings Paper

The Optical Stepper With A High Numerical Aperture I-Line Lens And A Field-By-Field Leveling System
Author(s): Kyoichi Suwa; Kazuo Ushida
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Paper Abstract

A high N.A. i-line lens and a field-by-field leveling system have been developed. Resolution of the lens is better than 0.65 μm. The leveling system has achieved ±0.3 uμ/field on an experimental basis.

Paper Details

Date Published: 1 January 1988
PDF: 7 pages
Proc. SPIE 0922, Optical/Laser Microlithography, (1 January 1988); doi: 10.1117/12.968424
Show Author Affiliations
Kyoichi Suwa, Nikon (Japan)
Kazuo Ushida, Nikon (Japan)


Published in SPIE Proceedings Vol. 0922:
Optical/Laser Microlithography
Burn Jeng Lin, Editor(s)

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