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Proceedings Paper

Through-The-Lens Automatic Focusing And Leveling In An Advanced Mask Stepper
Author(s): J. H. Burbo
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Paper Abstract

Design, mechanization and performance of a through-the-lens focus control system now in use by the mask-making facility at the IBM Essex Junction facility on their most advanced step-and-repeat cameras are discussed.

Paper Details

Date Published: 1 January 1988
PDF: 5 pages
Proc. SPIE 0922, Optical/Laser Microlithography, (1 January 1988); doi: 10.1117/12.968401
Show Author Affiliations
J. H. Burbo, IBM General Technology Division (United States)

Published in SPIE Proceedings Vol. 0922:
Optical/Laser Microlithography
Burn Jeng Lin, Editor(s)

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