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Proceedings Paper

High-Resolution Imaging Using Focused-Image Holography With Wave-Front Conjugation
Author(s): Ginetto Addiego; William G Oldham
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Paper Abstract

Experimental results of a high-resolution holographic imaging system using wave-front conjugation are demonstrated. The hologram is created from the information on a master mask that is imaged with a simple single-element lens. The aberrations introduced by the lens are eliminated because the rays retrace the path back-through the lens. The theoretical resolution in the fully coherent imaging system is λ / 2 NA = 0.61 μm ( λ = 488 nm, NA ~0.4). Sub-micrometer resolution of the reconstructed aerial image is experimentally observed over the entire 1 cm diameter field.

Paper Details

Date Published: 1 January 1988
PDF: 10 pages
Proc. SPIE 0922, Optical/Laser Microlithography, (1 January 1988); doi: 10.1117/12.968398
Show Author Affiliations
Ginetto Addiego, University of California Berkeley (United States)
William G Oldham, University of California Berkeley (United States)


Published in SPIE Proceedings Vol. 0922:
Optical/Laser Microlithography
Burn Jeng Lin, Editor(s)

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