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Proceedings Paper

Defect Detection And Classification Using The Euler Number
Author(s): Soo-Ik Chae; James T. Walker; Chong-Cheng Fu; R. Fabian Pease
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Paper Abstract

A new approach to defect detection and classification in VLSI circuit pattern inspection is described, which employs the Euler number of a local image as a feature. Defect classification rules represented with the sum and diffierence of two Euler numbers for a local image and its complement are derived, and additional rules to eliminate false detections from acceptable edge roughness are introduced. Simulation results for real image data are also presented.

Paper Details

Date Published: 1 January 1988
PDF: 8 pages
Proc. SPIE 0921, Integrated Circuit Metrology, Inspection, and Process Control II, (1 January 1988); doi: 10.1117/12.968391
Show Author Affiliations
Soo-Ik Chae, Stanford University (United States)
James T. Walker, Stanford University (United States)
Chong-Cheng Fu, Stanford University (United States)
R. Fabian Pease, Stanford University (United States)


Published in SPIE Proceedings Vol. 0921:
Integrated Circuit Metrology, Inspection, and Process Control II
Kevin M. Monahan, Editor(s)

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