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Proceedings Paper

An Electrical Test Structure For Routine 10Nm Reticle Overlay.
Author(s): C. M. Cork; E. G. Dobson
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Paper Abstract

This paper discusses INMOS UK's incoming Q.A. procedure for reticle overlay. The technique is based on an electrical differential linewidth test structure, known as a Three Leg Stickman, for measuring misalignment. This structure Is placed at four symmetric positions outside of the datafield of a reticle. When printed on test wafers it allows misalignments to be measured to a repeatabilty of 10nm and an accuracy of better than 20nm across a 20mm printed reticle frame. The paper discusses how the structure was optimised and shows that ±5ppm reticle overlay can be achieved with reticles written on a Varian VLS-40 E-beam system on Borosilicate glass. The technique also provides a variety of other information on stepper performance and has been used as part of an evaluation of the accuracy of commercial optical metrology systems.

Paper Details

Date Published: 1 January 1988
PDF: 11 pages
Proc. SPIE 0921, Integrated Circuit Metrology, Inspection, and Process Control II, (1 January 1988); doi: 10.1117/12.968390
Show Author Affiliations
C. M. Cork, Inmos Ltd. (UK)
E. G. Dobson, Inmos Ltd. (UK)

Published in SPIE Proceedings Vol. 0921:
Integrated Circuit Metrology, Inspection, and Process Control II
Kevin M. Monahan, Editor(s)

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