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Proceedings Paper

Scan Speed Effects In Optical Beam Induced Current Imaging
Author(s): P. D. Pester; T. Wilson
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Paper Abstract

We show how the speed of scanning in a scanning optical microscope can affect the beam induced current images of semiconducting samples. Experimental and theoretical results showing the effects of scan velocity are presented.

Paper Details

Date Published: 1 January 1988
PDF: 8 pages
Proc. SPIE 0921, Integrated Circuit Metrology, Inspection, and Process Control II, (1 January 1988); doi: 10.1117/12.968361
Show Author Affiliations
P. D. Pester, Oxford University (England)
T. Wilson, Oxford University (England)


Published in SPIE Proceedings Vol. 0921:
Integrated Circuit Metrology, Inspection, and Process Control II
Kevin M. Monahan, Editor(s)

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