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Proceedings Paper

Particle Detection By Low Voltage SEM
Author(s): Paul Buysse; Fedor Coopmans
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Paper Abstract

In an effort to learn more about the nature and distribution in size of particles encountered in device fabrication, we have studied the non destructive inspection performance obtained with standard and low voltage scanning electron microscopes. To simulate particle defects in and on layers, diamond particles with known size were used. This present study proves that the low voltage SEM is an excellent tool to detect and measure very small particle defects on layers but the performance for particles within layers is marginal.

Paper Details

Date Published: 1 January 1988
PDF: 7 pages
Proc. SPIE 0921, Integrated Circuit Metrology, Inspection, and Process Control II, (1 January 1988); doi: 10.1117/12.968353
Show Author Affiliations
Paul Buysse, IMEC vzw (Belgium)
Fedor Coopmans, IMEC vzw (Belgium)

Published in SPIE Proceedings Vol. 0921:
Integrated Circuit Metrology, Inspection, and Process Control II
Kevin M. Monahan, Editor(s)

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