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Proceedings Paper

SCM Simulation Of Secondary Electron Signals Detected By MCP
Author(s): Ryoh Mimura; Atsushi Yamada; Ryuso Aihara; Mike Hassel Shearer; William Thompson
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Paper Abstract

An annular shape micro channel plate(MCP) placed above a wafer is a detector suited for electron beam (EB) line-width measurement. Acceptance diagrams for secondary electrons and packscattered electrons on the MCP detector were obtained by the surface charge method (SCM) calculation. The secondary electron detection efficiencies on the MCP detector were also obtained from this calculation. By applying adequate bias voltage at the center pipe of the MCP detector, the efficiency is increased to 95%.

Paper Details

Date Published: 1 January 1988
PDF: 7 pages
Proc. SPIE 0921, Integrated Circuit Metrology, Inspection, and Process Control II, (1 January 1988); doi: 10.1117/12.968351
Show Author Affiliations
Ryoh Mimura, JEOL Ltd (Japan)
Atsushi Yamada, JEOL Ltd (Japan)
Ryuso Aihara, JEOL Ltd (Japan)
Mike Hassel Shearer, JEOL USA Inc (United States)
William Thompson, JEOL USA Inc (United States)

Published in SPIE Proceedings Vol. 0921:
Integrated Circuit Metrology, Inspection, and Process Control II
Kevin M. Monahan, Editor(s)

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