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Proceedings Paper

Study Of The Reaction Kinetics Of The Photoresist Aging Process
Author(s): Thiloma Perera; Michael P. C. Watts
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Paper Abstract

The aim of this work was to determine the effect of aging on absorption, thickness and dissolution characteristics of precoated photoresist blanks. Experimental results indicate that the aging of photoresist involves bleaching and darkening reactions. The temperature dependency of these reactions follow the Arrhenius Law.

Paper Details

Date Published: 1 January 1988
PDF: 14 pages
Proc. SPIE 0920, Advances in Resist Technology and Processing V, (1 January 1988); doi: 10.1117/12.968317
Show Author Affiliations
Thiloma Perera, AZ Photoresist Products (United States)
Michael P. C. Watts, AZ Photoresist Products (United States)

Published in SPIE Proceedings Vol. 0920:
Advances in Resist Technology and Processing V
Scott A. MacDonald, Editor(s)

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