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Proceedings Paper

Photophysical Investigations Of Spin Cast Novolac Films
Author(s): Laura L. Kosbar; Curtis W. Frank
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Paper Abstract

Fluorescence techniques were used to study the effects of casting solvent and film thickness on spin cast novolac films. A fluorescent probe, pyrene, was covalently bonded to the novolac backbone, and changes in its fluorescence were used to monitor the effects of casting on the films. The amount of excimer fluorescence depends on casting solvent and rises dramatically for very thin films (<2000 A), perhaps indicating an increase in ordering. Novolac polymers with various levels of pyrene tagging were used to measure the extent of pyrene aggregation. The tagged and free probes had similar responses at low concentrations (<= 5 mol% probe) but at high probe concentrations (20 mol% probe) the free probe aggregates to a greater extent than the tagged probe. The extent of aggregation is also affected by the casting solvent.

Paper Details

Date Published: 1 January 1988
PDF: 3 pages
Proc. SPIE 0920, Advances in Resist Technology and Processing V, (1 January 1988); doi: 10.1117/12.968312
Show Author Affiliations
Laura L. Kosbar, Stanford University (United States)
Curtis W. Frank, Stanford University (United States)


Published in SPIE Proceedings Vol. 0920:
Advances in Resist Technology and Processing V
Scott A. MacDonald, Editor(s)

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