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Proceedings Paper

MID UV Resist Materials Containing Pyridinium Ylides
Author(s): Reinhold Schwalm; Andreas Bottcher; Horst Koch
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Paper Abstract

Polymers containing pyridinium-ylide units were prepared as water soluble MID UV resist materials. The absorption maxima of the N-iminopyridinium ylides are centered around 320 nm. Upon exposure the ylide sensitizer bleaches cleanly and undergoes two competing reactions, leading via a singlet state to 1,2-diazepines and via a triplet state to pyridine and nitrenes. Both reactions are accompanied by a change in polarity and can be used in the application as photoresists. This pronounced polarity change renders the polymers hydrophobic and water repellant. Therefore negative images can be obtained by development with pure water. Due to a quantum yield below 0.1 the sensitivity is low, but can be enhanced by addition of sensitizers.

Paper Details

Date Published: 1 January 1988
PDF: 6 pages
Proc. SPIE 0920, Advances in Resist Technology and Processing V, (1 January 1988); doi: 10.1117/12.968297
Show Author Affiliations
Reinhold Schwalm, BASF Aktiengesellschaft (Germany)
Andreas Bottcher, BASF Aktiengesellschaft (Germany)
Horst Koch, BASF Aktiengesellschaft (Germany)


Published in SPIE Proceedings Vol. 0920:
Advances in Resist Technology and Processing V
Scott A. MacDonald, Editor(s)

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