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Proceedings Paper

High Resolution X-Ray-Tv-Sensors
Author(s): Rudolf Germer
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Paper Abstract

Semiconductor devices are sensitive to X-rays. Array sensors can be constructed with integrated circuits as CCD's. Their application -to X-ray imaging is discussed especially to get a high spatial resolution. This is shown to be possible with some 10 μm resolution using a CCD-sensor covered with a converter screen. Furthermore such a screen protects the CCD against radiation damage. It could be demonstrated that soft X-radiation produces most of the damage. The life time of a sensor can be enhanced by a factor of more than 100 if a converter screen absorbs most of the soft radiation.

Paper Details

Date Published: 1 February 1985
PDF: 8 pages
Proc. SPIE 0491, 16th Intl Congress on High Speed Photography and Photonics, (1 February 1985); doi: 10.1117/12.967957
Show Author Affiliations
Rudolf Germer, Fritz-Haber-Institut der MPG (Germany)

Published in SPIE Proceedings Vol. 0491:
16th Intl Congress on High Speed Photography and Photonics
Michel L. Andre; Manfred Hugenschmidt, Editor(s)

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