Share Email Print
cover

Proceedings Paper

Ion-Assisted Deposition Of Lanthanide Trifluorides For VUV Applications
Author(s): L. J. Lingg; J. D. Targove; J. P. Lehan; H. A. Macleod
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The lanthanide trifluorides show promise as vacuum ultraviolet (VUV) coating materials. The optical properties of single-layer coatings vary with deposition temperature, and with ion-beam energy and current density. The optical constants, stoichiometry, durability, moisture adsorption, and crystallinity are studied for trifluoride films made under a variety of deposition conditions.

Paper Details

Date Published: 1 January 1987
PDF: 8 pages
Proc. SPIE 0818, Current Developments in Optical Engineering II, (1 January 1987); doi: 10.1117/12.967478
Show Author Affiliations
L. J. Lingg, University of Arizona (United States)
J. D. Targove, University of Arizona (United States)
J. P. Lehan, University of Arizona (United States)
H. A. Macleod, University of Arizona (United States)


Published in SPIE Proceedings Vol. 0818:
Current Developments in Optical Engineering II
Robert E. Fischer; Warren J. Smith, Editor(s)

© SPIE. Terms of Use
Back to Top