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Proceedings Paper

Multiple Imaging Using Two 1-D Phase Gratings With Uniformly Diffracted Spots
Author(s): Zhen Wu; Ping Zhang; Yu Ruan
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Paper Abstract

Optical system that can produce multiple images of an object are specially useful for the microelectronics industry. It may replace costly and time-consuming step and repeat cameras. For this kind of optical system, the major problems are in achieving a high resolving power in images that can be a large size while keeping the distortion less than 2 %. Meanwhile, the positions of the multiple images in the array must be within submicron tolerances.

Paper Details

Date Published: 1 January 1987
PDF: 2 pages
Proc. SPIE 0813, Optics and the Information Age, (1 January 1987); doi: 10.1117/12.967375
Show Author Affiliations
Zhen Wu, Huazhong Univ. of Sci. and Tech. (China)
Ping Zhang, Huazhong Univ. of Sci. and Tech. (China)
Yu Ruan, Huazhong Univ. of Sci. and Tech. (China)

Published in SPIE Proceedings Vol. 0813:
Optics and the Information Age
Henri H. Arsenault, Editor(s)

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