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Proceedings Paper

Spectral Analysis Of The Partially Coherent Transfer Application To Linewidth Measurement On Wafers
Author(s): D. Charraut; D. Couiljon; G. Bou Debs; M. Guillaltme; J. L. Buevoz; N. Alcouffe; P. Livrozet
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Paper Abstract

The need of measuring the linewidths on wafers more and more precisely imposes the improvement of the optical methods like microscopy by taking into account the various parameters which define the system. In this way, several techniques have been developed in order to simulate the transfer with accuracy (1,2). This modelling allows one to carry out comparative methods, simulation-experiment, for retrieving the desired object parameters.

Paper Details

Date Published: 1 January 1987
PDF: 2 pages
Proc. SPIE 0813, Optics and the Information Age, (1 January 1987); doi: 10.1117/12.967169
Show Author Affiliations
D. Charraut, Universite de Franche-Comte-Besancon (France)
D. Couiljon, Universite de Franche-Comte-Besancon (France)
G. Bou Debs, Universite de Franche-Comte-Besancon (France)
M. Guillaltme, Centre National d'Etudes des Telecommunications (France)
J. L. Buevoz, Centre National d'Etudes des Telecommunications (France)
N. Alcouffe, Societe Microcontrole (France)
P. Livrozet, Societe Microcontrole (France)


Published in SPIE Proceedings Vol. 0813:
Optics and the Information Age

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