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Proceedings Paper

Precise Measurement Of Pzt Mirror Movement Using Fft Method
Author(s): Toyohiko Yatagai; Masaya Kobayashi
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Paper Abstract

Recently smart algorithms for interferometric fringe analysis have been developed, including the fringe scanning or the phase shifting method, the subfringe integration method, the FFT method and so on. Some of them cover the measurement ranges from 1/1000 wavelength to 10 wavelength with very high accuracy and repeatability.

Paper Details

Date Published: 1 January 1987
PDF: 2 pages
Proc. SPIE 0813, Optics and the Information Age, (1 January 1987); doi: 10.1117/12.967153
Show Author Affiliations
Toyohiko Yatagai, University of Tsukuba (Japan)
Masaya Kobayashi, University of Tsukuba (Japan)


Published in SPIE Proceedings Vol. 0813:
Optics and the Information Age

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