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Proceedings Paper

On The Reconstruction Of The Topography Of A Rough Metal Surface By Optical Ellipsometry On The Diffusely Scattered Light. Beyond The First-Order Born Approximation In Vector Scattering Theory
Author(s): O. Keller; P. Sonderkaer
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Paper Abstract

On the basis of a recently established dyadic Green's function formalism describing the diffuse scattering of light from a rough surface, we investigate the fundamental integral equation describing, selfconsistently, the electromagnetic field in the selvedge, i.e. profile, region. With emphasis on the physical properties, a detailed description is given of the Green's function which by screened radiation couples the different external current density sources in the profile together. Numerical calculations showing the electromagnetic radiation in the plane of a flat surface stemming from an oscillating dipole just outside the surface are presented. Finally, a few remarks are presented concerning the determination of the selvedge field associated with a so-called strip geometry of the surface topography.

Paper Details

Date Published: 1 January 1987
PDF: 14 pages
Proc. SPIE 0802, In-Process Optical Metrology for Precision Machining, (1 January 1987); doi: 10.1117/12.967121
Show Author Affiliations
O. Keller, University of Aalborg (Denmark)
P. Sonderkaer, University of Aalborg (Denmark)


Published in SPIE Proceedings Vol. 0802:
In-Process Optical Metrology for Precision Machining
Peter Langenbeck, Editor(s)

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