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Proceedings Paper

Converting A Commercially Available Linnik Microinterferometer Into A Fringe Scanning Optical Profiler
Author(s): B. Cencic; M. Barut; F. Cepon
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Paper Abstract

As a low cost approach to fringe scanning profilometry, a commercially available Linnik microinterferometer was equipped with a CCD array, interfaced to an IBM PC. The instrument's potentials and limitations will be discussed.

Paper Details

Date Published: 1 January 1987
PDF: 8 pages
Proc. SPIE 0802, In-Process Optical Metrology for Precision Machining, (1 January 1987); doi: 10.1117/12.967120
Show Author Affiliations
B. Cencic, Iskra CEO (Yugoslavia)
M. Barut, Iskra CEO (Yugoslavia)
F. Cepon, Iskra CEO (Yugoslavia)


Published in SPIE Proceedings Vol. 0802:
In-Process Optical Metrology for Precision Machining
Peter Langenbeck, Editor(s)

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