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Proceedings Paper

Dynamically Focusing Electro-Optical Sensor-System For Micro Rofilometry
Author(s): Breitmeier U.; Ahlers R J.
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Paper Abstract

Elektro-optical measurement systems for the measurement of microgeometries are of increasing importance in quality control. Disadvantages of the tactile probes can be avoided to a large extent by utilizing non-touching methods /1/. This holds for

Paper Details

Date Published: 1 January 1987
PDF: 6 pages
Proc. SPIE 0802, In-Process Optical Metrology for Precision Machining, (1 January 1987); doi: 10.1117/12.967118
Show Author Affiliations
Breitmeier U., Ulrich Breitmeier MeStechnik (United States)
Ahlers R J., Fraunhofer-Institut fUr Produktionstechnik und Automatisierung (United States)


Published in SPIE Proceedings Vol. 0802:
In-Process Optical Metrology for Precision Machining
Peter Langenbeck, Editor(s)

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