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Proceedings Paper

In-Process Optical Metrology For Precision Machining
Author(s): Rudiger Haberland
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Paper Abstract

Straylight Measurement, Interferometric Measurement, Schlieren Microscopy, Optical Distance Sensing and Capacitive Distance Measurement are reviewed in their potential for in-process metrology. Today existing restraints are outlined and development necessities discussed.

Paper Details

Date Published: 1 January 1987
PDF: 4 pages
Proc. SPIE 0802, In-Process Optical Metrology for Precision Machining, (1 January 1987); doi: 10.1117/12.967114
Show Author Affiliations
Rudiger Haberland, Universita Kaiserslautern (United States)


Published in SPIE Proceedings Vol. 0802:
In-Process Optical Metrology for Precision Machining
Peter Langenbeck, Editor(s)

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