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Proceedings Paper

A Novel Optoelectronic Instrument For On-Line Precise Measurements
Author(s): A, Woithuis; K. Biising; L. Bource; G. Dalessi
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Paper Abstract

A novel highly precise distance measurement tool is introduced. Using an optical autofocussing head and a backlash free mechanical translation mechanism, it is possible to reach a resolving power of 0.1 micron and an absolute accuracy of better than 1 micron in combination with a measurement range of 40 millimeters. Due to the character of the autofocus it is also possible to recognize on-line the inclination and curvature of the surface.

Paper Details

Date Published: 1 January 1987
PDF: 4 pages
Proc. SPIE 0802, In-Process Optical Metrology for Precision Machining, (1 January 1987); doi: 10.1117/12.967110
Show Author Affiliations
A, Woithuis, Applied Laser Technology b.v. (Netherlands)
K. Biising, Fraunhofer Institut fur Produktionstechnologie (Germany)
L. Bource, Applied Laser Technology b.v. (Netherlands)
G. Dalessi, Applied Laser Technology b.v. (Netherlands)


Published in SPIE Proceedings Vol. 0802:
In-Process Optical Metrology for Precision Machining
Peter Langenbeck, Editor(s)

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