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Proceedings Paper

Roof Edge Test (RET) For Micro-Roughness
Author(s): P Langenbeck
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Paper Abstract

Roughness of micromachined surfaces and certain error motions occuring in micromachi ning may be determined by evaluating the mechanical interaction between two surfaces micro-machined successively on a substrate such as to form a small prismatic angle of, say, 1 arc.sec. Thereby a ridge is generated with a texture interlacing the two individual cutting patterns. Such substrate calibrates the phase - or interference - contrast image of samples in a range extending below about λ /20. Below that limit, it is impossible to correlate the image intensity profile with the surface relief. With RET one can measure the depth of machining profile in the order of between 0.01 and 0.005 pm, using a common microscope.

Paper Details

Date Published: 1 January 1987
PDF: 5 pages
Proc. SPIE 0802, In-Process Optical Metrology for Precision Machining, (1 January 1987); doi: 10.1117/12.967106
Show Author Affiliations
P Langenbeck, Ingenieur-Agentur fOr Neue Technologie in Optik und Precision Engineering (United States)

Published in SPIE Proceedings Vol. 0802:
In-Process Optical Metrology for Precision Machining
Peter Langenbeck, Editor(s)

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